• 분무 열분해 장치는 가열된 기판에 용액을 분무하여 박막을 입히는 장치이다.
원하는 박막물질만 남고 용액의 다른 물질은 모두 증발하도록 온도를 설정하여 박막을 생성한다.
일반적으로 금속산화물의 도포에 주로 사용되어 왔다.
전형적인 사용 예는 유리기판위에 산화주석(SnO2)의 전도성 피막을 생성하는 것이다.
• 스테퍼 모터로 움직이는 XY 방향 스테이지에 분무 노즐이 고정되어 있어서 지정된 움직임으로 분무할 수 있다.
기판은 자동으로 온도를 유지하는 가열플레이트에 놓인다.
사양 :
액추에이터 ········································· Stepper motor
도포용액 용량 ····································· 250ml &; 500ml
초당 도포량 ········································ 1-20ml/sec.
분무기 이송속도··································· X 10-200mm/sec
Y 1-5mm/sec
가열 플레이트
크기 ··················································· 150X150mm
최대온도 ············································ 400 °C
전원 ··················································· 230V, 50Hz
PC 연결 ·············································· Serial port (RS232)
| Description | cat. No. | Q'ty |
| 분무 열분해 장치 | 1 |